Electrostatically actuated silicon-based nanomechanical switch at room temperature
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چکیده
منابع مشابه
Electrostatically actuated silicon-based nanomechanical switch at room temperature
We demonstrate a silicon-based high-frequency nanomechanical device capable of switching controllably between two states at room temperature. The device uses a nanomechanical resonator with two distinct states in the hysteretic nonlinear regime. In contrast to prior work, we demonstrate room-temperature electrostatic actuation and sensing of the switching device with 100% fidelity by phase modu...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2008
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2964196